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HOME / ǰ Ұ / ý / Passive Isolator / ũ Passive |
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ǰ |
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ڸ Diaphragm Air Spring Ͽ , |
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ϰ پ OPTION |
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, 淮 Honeycomb ä |
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Ŭ ȯ濡 |
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ǰ 뵵 |
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Microscope |
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Probe Station |
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Mask Aligner |
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ǥ , 浵 |
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Patch Clamp |
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AFM, STM |
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Other Precision Equipment |
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ǰ |
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Model |
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ADZ-A0806 |
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ADZ-A1007 |
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ADZ-A1207 |
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Natural Frequency |
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1.2Hz ~ 1.5Hz
(Vertical, Horizontal) |
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1.5Hz ~ 1.8Hz
(Vertical, Horizontal) |
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Isolation |
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Vertical : Diaphragm air spring (Air damping by orifice)
Horizontal : Anti-Vibration rubber |
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Leveling |
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Height control valves keeps the surface table level automatically |
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Top Plate Dimension
(mm) |
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800x600x50 |
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1000x750x50 |
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1200x750x50 |
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Top Plate Material |
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Honeycomb core, Top plate SUS430 5t(6t), Bottom plate SS400 (3.2t) |
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Dimension (mm) |
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900x700x750 |
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1100x850x750 |
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1300x850x750 |
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Weight (kg) |
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110kg |
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145kg |
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165kg |
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Payload (kgf) |
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200kgf |
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250kgf |
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300kgf |
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Air Pressure (MPa) |
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0.35MPa ~ 0.70MPa |
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